Ikwirakwizwa rya Electron Microscope (TEM) nubuhanga bwo gusesengura imiterere ya microphysical bushingiye kuri microscopi ya electron ishingiye kumirasire ya electron nkisoko yumucyo, ikemurwa ntarengwa rya 0.1nm.Kugaragara kwa tekinoroji ya TEM byateje imbere cyane imipaka yumuntu witegereza amaso yubusa ya microscopique, kandi ni ibikoresho byingirakamaro bya microscopique yo kureba mu gice cya semiconductor, kandi kandi ni ibikoresho byingirakamaro mubushakashatsi nibikorwa byiterambere, gukurikirana ibikorwa rusange, hamwe nibikorwa isesengura ridasanzwe mu gice cya semiconductor.
TEM ifite intera nini cyane ya porogaramu mu gice cya semiconductor, nko gusesengura uburyo bwo gukora wafer, isesengura rya chip, isesengura rya chip, gusesengura no gusesengura inzira ya semiconductor, nibindi, abakiriya bashingiye kuri fabs, ibihingwa bipakira, chip ishushanya ibigo, ibikoresho bya semiconductor ubushakashatsi niterambere, ubushakashatsi bwibintu niterambere, ibigo byubushakashatsi bwa kaminuza nibindi.
GRGTEST TEM Tekinike yubushobozi bwa tekinike
Itsinda rya tekinike rya TEM riyobowe na Dr. Chen Zhen, kandi inkingi ya tekinike yikipe ifite uburambe bwimyaka irenga 5 mubikorwa bijyanye.Ntabwo bafite uburambe bukomeye mubisesengura ryibisubizo bya TEM, ariko kandi bafite uburambe bukomeye mugutegura icyitegererezo cya FIB, kandi bafite ubushobozi bwo gusesengura 7nm no hejuru yiterambere rya wafer hamwe nuburyo bwibanze bwibikoresho bitandukanye bya semiconductor.Kugeza ubu, abakiriya bacu bari hirya no hino mu gihugu imbere ya fabs, inganda zipakira, amasosiyete akora chip, kaminuza n'ibigo byubushakashatsi bwa siyansi, nibindi, kandi bizwi cyane nabakiriya.
Igihe cyo kohereza: Apr-13-2024