Intangiriro kuri kabiri ya scanning electron microscopi (DB-FIB)

Ibikoresho by'ingenzi mu buhanga bwo gusesengura mikorobe birimo: microscopi optique (OM), microscopi ya elegitoroniki ebyiri (DB-FIB), scanning electron microscopie (SEM), hamwe na microscopi ya electron (TEM).Ingingo yuyu munsi izerekana ihame nogukoresha DB-FIB, yibanda kubushobozi bwa serivise ya metero na radiyo televiziyo DB-FIB no gukoresha DB-FIB mu isesengura rya semiconductor.

DB-FIB ni iki
Dual-beam scanning electron microscope (DB-FIB) nigikoresho gihuza ion beam yibanze hamwe na scaneri ya electron kuri microscope imwe, kandi ifite ibikoresho nka sisitemu yo gutera gaze (GIS) na nanomanipulator, kugirango bigere kubikorwa byinshi nko gutobora, kubika ibintu, micro na nano gutunganya.
Muri byo, intumbero ya ion beam (FIB) yihutisha urumuri rwa ion ruterwa nicyuma cya gallium cyuma (Ga), hanyuma ikibanda hejuru yicyitegererezo kugirango itange ibimenyetso bya elegitoroniki ya kabiri, kandi ikusanywa na detector.Cyangwa ukoreshe imbaraga za ion beam kugirango ushire hejuru yicyitegererezo cyo gutunganya micro na nano;Uruvange rwimyuka yumubiri na gaze ya chimique irashobora kandi gukoreshwa muguhitamo etch cyangwa kubitsa ibyuma na insulator.

Ibikorwa nyamukuru nibisabwa bya DB-FIB
Ibikorwa by'ingenzi: ingingo ihamye itunganijwe, gutunganya icyitegererezo cya TEM, gutoranya cyangwa kuzamura ibyokurya, kubika ibyuma no kubika ibice.
Umwanya wo gusaba: DB-FIB ikoreshwa cyane mubikoresho byubutaka, polymers, ibikoresho byuma, ibinyabuzima, semiconductor, geologiya nizindi nzego zubushakashatsi no gupima ibicuruzwa bijyanye.By'umwihariko, DB-FIB idasanzwe yihariye-yohereza icyitegererezo cyo gutegura icyitegererezo ituma idasimburwa mubushobozi bwo gusesengura igice cya kabiri.

GRGTEST DB-FIB ubushobozi bwa serivisi
DB-FIB kuri ubu ifite ibikoresho bya Laboratoire ya Shanghai IC Isesengura n’isesengura ni Helios G5 ya seriveri ya Thermo Field, ikaba ari Ga-FIB yateye imbere ku isoko.Urukurikirane rushobora kugera kuri scanning electron beam imashusho ibyemezo biri munsi ya 1 nm, kandi birarushijeho kuba byiza mubijyanye na ion beam imikorere no kwikora kuruta ibisekuruza byabanjirije microscopi ya elegitoroniki ebyiri.DB-FIB ifite ibikoresho bya nanomanipulator, sisitemu yo gutera gazi (GIS) hamwe ningufu za EDX kugirango ihuze ibyifuzo bitandukanye byibanze kandi byateye imbere byananiranye.
Nka gikoresho gikomeye cyo gusesengura igice cya kabiri cyumutungo wananiwe gusesengura, DB-FIB irashobora gukora-point-point-cross-crossing hamwe na nanometero neza.Mugihe kimwe cyo gutunganya FIB, scan ya electron yamashanyarazi hamwe na nanometero irashobora gukoreshwa mugukurikirana microscopique morphologie ya cross-section no gusesengura ibihimbano mugihe nyacyo.Kugera ku gushira ibikoresho bitandukanye byuma (tungsten, platine, nibindi) nibikoresho bitari ibyuma (karubone, SiO2);Ibice bya TEM ultra-thin birashobora kandi gutegurwa mugihe cyagenwe, gishobora kuba cyujuje ibyangombwa byo gukurikiranwa na ultra-high reaction kurwego rwa atome.
Tuzakomeza gushora imari mu bikoresho bya elegitoroniki bigezweho, dukomeze kunoza no kwagura isesengura ry’imikorere ya semiconductor, kandi duhe abakiriya ibisubizo birambuye kandi byuzuye byo gusesengura kunanirwa.